Online Beam Current Estimation in Particle Beam Microscopy

In conventional particle beam microscopy, knowledge of the current is essential for accurate micrograph formation and sample milling. This generally necessitates offline calibration instrument. this work, we establish that can be estimated online, from same secondary electron count data used to form micrographs. Our methods depend on recently introduced time-resolved measurement concept, which combines multiple short measurements at a single pixel has previously been shown partially mitigate effect variation accuracy. We analyze problem jointly estimating yield using Cramér–Rao bound. Joint estimators operating exploit models inter-pixel correlation Markov are proposed tested synthetic microscopy data. estimates incorporate explicit estimation beat state-of-the-art methods, resulting in accuracy nearly indistinguishable what obtained with perfect knowledge. novel could help improve milling outcomes, prevent damage, enable online instrument diagnostics.